150mm (6″) Automated Wafer Inspection
Inspection Cameras can be added to SPPE and SPPE-SORT equipment to automatically inspect any aspect of the wafer.
The inspection application is decided by the end user. EMU can offer simple inspection systems to, for example, check the colour of the wafer and more sophisticated systems to identify visual defects/scratches on the wafer.
The machine will typically give a pass or fail result after the Inspection, images can be stored for later reference if required.
Inspection Cameras can be installed to analyse the front or back side of the wafer.
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