150mm (6″) Batch ID Reader
IDWR150 (Batch ID Reader) aligns and reads the Identification tag on a 150mm wafer.
The system uses a Cognex 1741 Camera and is able to read Lasermarks or Datamatrix Tags on the active and rear faces of a wafer. Wafers are aligned using our patented batch alignment system.
Wafers are mapped prior to alignment & reading, checking for wafer presence cross and/or double slots.
The system can be connected to the host by SECS/GEM through RS232 or Ethernet. Process recipes and maintenance can be accessed via a simple to use touchscreen interface.
The machine cycle time for reading a batch of 25 wafers is 2 minutes, including cassette mapping, batch alignment and reading each wafer in the Lot.