150mm (6″) Batch Pick and Place
EMU Technologies BPP is a table top, batch wafer pick & place tool that uses non-vacuum technology to transfer wafers between cassettes.
Cassettes are mapped for wafer presence, cross or double slot detection and wafer safety sensors are active throughout the loading and transfer process.
Typically the machine is supplied with 1 Load Port, but a 2 Load Port system is also available.
BPP is compatible with various substrate materials including Silicon Carbide (SiC) and Gallium Nitride (GaN).