150mm (6″) Batch Slide Transfer
The AWT (Automated Wafer Transfer) and MWT (Manual Wafer Transfer) machines transfer wafers horizontally between cassettes.
On AWT, a series of sensors on the loading stage ensure cassettes are in the correct position for transfer. Removing a cassette during a transfer cycle will automatically stop the cycle. Mechanical guides on the load stage also help the Operator place the cassettes correctly.
Overcurrent detection on the motor ensures transfers are automatically stopped if any unusual resistance is felt during the transfer process.
MWT has a self-returning transfer arm, so the machine is always ready to use.
MWT is compatible with various substrate materials including Silicon Carbide (SiC) and Gallium Nitride (GaN).