150mm (6″) Flat Aligner and Elevator
FFE150 (Flat Finder and Elevator) is a single stage tool that aligns wafers by the flat and elevates them for inspection by the Operator.
Wafers are aligned using the heavily industrialized alignment technology developed by Recif Technologies and used in the multiple standalone and OEM systems. The post alignment angle can be selected through the User Interface.
Wafers are elevated from the carrier using 2 vacuum-free combs.
The Lighting Unit illuminates wafers for inspection. The design means it cannot touch the carrier or wafers when it is on the load stage. The Lighting Unit LED system can be configured on request, but is usually supplied with Red or White LED’s.
FFE150 is compatible with various substrate materials including Silicon Carbide (SiC) and Gallium Nitride (GaN).