200mm (8″) Notch Aligner and Elevator
EMU Technologies NFE200 is a single stage tool that aligns wafers by the notch and elevates them for inspection by the Operator.
Wafers are aligned using the heavily industrialised alignment technology developed by Recif Technologies and used in the field for 10+ years. The final position can be selected through the User Interface.
Wafers are elevated from the carrier using 2 vacuum-free combs.
The Lighting Unit illuminates wafers for inspection. The design means it cannot touch the carrier or wafers when it is on the load stage. The Lighting Unit can be supplied with Red or Bright White LED’s.
NFE200 is compatible with various substrate materials including Silicon Carbide (SiC) and Gallium Nitride (GaN).