200mm (8″) Notch Aligner
The ANA (Automated Notch Aligner) and MNA (Manual Notch Aligner) align a batch of 200mm wafers by the notch.
Wafers are aligned using the heavily industrialized alignment technology developed by Recif Technologies, used in the multiple standalone and OEM systems
On ANA, the post alignment angle can be selected through the user interface. Automatic starting on placement of a cassette can also be selected in the interface menu.
A 360° batch rotation without alignment for Operator inspection can be offered.
MNA is highly cost-effective and has been designed for simple and straight-forward use, without compromising wafer safety & particle contamination.
200mm Manual or Automated Flat Aligners can also be manufactured on request.
Notch Aligners are compatible with various substrate materials including Silicon Carbide (SiC) and Gallium Nitride (GaN).