150mm (6″) Batch Slide Transfer
MWT (Manual Wafer Transfer) is available for 75mm, 100mm and 125mm batch transfer applications.
Batch transfer of mixed wafer sizes is possible, dependent on the cassette specification.
MWT has a self-returning transfer arm, so the machine is always ready to use.
MWT is compatible with various substrate materials including Silicon Carbide (SiC) and Gallium Nitride (GaN).