Recif Metal Cassettes can be offered for 150mm, 200mm or 300mm applications. EMU can offer Metal Cassettes to all European based end users.
Metal Cassettes are compliant with thermal processes up to 400°c.
300mm Cassettes can be offered in 25 slot or 13 slot configurations. A lighter design is also available (4.85Kgs vs 5.6Kgs) and a locking device for enhanced wafer safety is available.
150mm and 200m Cassettes can be supplied with handle on the side for easier manual handling by the Operator.